University of PardubiceFaculty of Chemical Technology

University

Employees
|
Students
Česky

Publication detail

Spectroscopic Ellipsometry Study of Plasma-Polymerised Viniltriethoxysilane Films

Authors: Mistrík Jan

Year: 2007

Type of publication: ostatní - přednáška nebo poster

Page from-to: nestránkováno

Titles:

Language	Name	Abstract	Keywords
cze	Elipsometrické studium VTES vrstev připravených plazmovou polymerací	Elipsometrické studium tloušťkové série vrstev viniltriethoxysilanu připravených plazmovou polymerací. Důraz je kladen na detekci tloustkové nehomegenity těchto vrstev.
eng	Spectroscopic Ellipsometry Study of Plasma-Polymerised Viniltriethoxysilane Films	Plasma-polymerised vinyltriethoxysilane (pp-VTES) films with thicknesses ranging from 20 nm to about 5 um were studied by combined method of spectroscopic ellipsometry and optical reflectivity in VIS and UV spectral zone. For these photon energies Tauc-Lorentz dielectric function (with a band gap of about 2.5 eV) was found to be an appropriate parameterisation of pp-VTES optical constants. Various sample models, accounting for the presence of film interfaces, film refractive index gradient profile and film thickness non uniformity were considered. Pp-VTES films (t < 1um) can be considered as homogeneous films, whereas thick films show imperfections, which dominant character was assigned to film thickness non uniformity.	ellipsometry;organosilicates;plasma polymerization;VTES