Publication detail
Spectroscopic ellipsometry: its accuracy and potenciality
Authors:
Mistrík Jan | Yamaguchi T. | Antos R. | Jiang Z. | Ohlídal I. | Aoyama M.
Year: 2006
Type of publication: článek v odborném periodiku
Name of source: International Journal of Microwave and Optical Technology
Publisher name: ISRAMT
Place: Reno, Nevada, USA
Page from-to: 523-527