Publication detail
Spectroscopic ellipsometry: its accuracy and potenciality
Authors:
Mistrík Jan | Yamaguchi T. | Antos R. | Jiang Z. | Ohlídal I. | Aoyama M.
Year:
2006
Type of publication:
článek v odborném periodiku
Name of source:
International Journal of Microwave and Optical Technology
Publisher name:
ISRAMT
Place:
Reno, Nevada, USA
Page from-to:
523-527
