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RF magnetron sputtered Ag-Sb-S amorphous thin films.
Authors: Gutwirth | Wágner Tomáš | Drašar Čestmír | Beneš Ludvík | Vlček Milan | Hrdlička | Peřina | Frumar Miloslav | Schwarz Jiří | Tichá Helena
Year: 2006
Type of publication: ostatní - přednáška nebo poster
Name of source: Program & Abstract book of the 22nd Symposium on Plasma Physics and Technology
Publisher name: N
Place:
Page from-to:
Titles:
Language Name Abstract Keywords
cze Amorfní tenké vrstvy Ag-Sb-S naprášené RF magnetronem. Byly studovány amorfní tenké vrstvy Ag-Sb-S naprášené RF magnetronem. amorfní chalkogenidy, tenké vrstvy, naprašování
eng RF magnetron sputtered Ag-Sb-S amorphous thin films. RF magnetron sputtered Ag-Sb-S amorphous thin films were studied. amorphous chalcogenides, thin films, sputtering