Publication detail
Convergence properties of critical dimension measurements by spectroscopic ellipsometry on gratings made of various materials
Authors:
Antoš | Pištora | Mistrík Jan | Yamaguchi | Yamaguchi | Horie | Višnovský | Otani
Year: 2006
Type of publication: článek v odborném periodiku
Name of source: Journal of Applied Physics
Publisher name: American Institute of Physics
Place: Melville
Page from-to: 054906-054917
