Publication detail

Selective etching of thin chalcogenide layers and its applications

Authors: Fišerová Alena | Vlček Miroslav

Year: 2006

Type of publication: ostatní - přednáška nebo poster

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Language	Name	Abstract	Keywords
cze	Selektivní leptání tenkých vrstev chalkogenidů a aplikace jevu	Photoinduced changes of chemical resistence of amorphous chalcogenide thin layers of As-S, As-S-Ge, Ge-S, Ge-Se and Ge-S-Se systems are studied in this work. Possible mechanisms of both, positive and negative selective etching in alkaline solvents are discussed in this paper. Application of this phenomenon for diffractive optical elements fabrication is demonstrated. High efficiency phase gratings and microlense arrays were prepared in the layers of some studied compositions.
eng	Selective etching of thin chalcogenide layers and its applications	Photoinduced changes of chemical resistence of amorphous chalcogenide thin layers of As-S, As-S-Ge, Ge-S, Ge-Se and Ge-S-Se systems are studied in this work. Possible mechanisms of both, positive and negative selective etching in alkaline solvents are discussed in this paper. Application of this phenomenon for diffractive optical elements fabrication is demonstrated. High efficiency phase gratings and microlense arrays were prepared in the layers of some studied compositions.	chalcogenide glass, selective etching,

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