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Comparisons of various deposition techniques for preparation of thin films

Authors: Přikryl Jan | Pavlišta Martin | Střižík Lukáš | Wágner Tomáš | Frumar Miloslav

Year: 2012

Type of publication: ostatní do riv

Page from-to: nestránkováno

Titles:

Language	Name	Abstract	Keywords
cze	Comparisons of various deposition techniques for preparation of thin films	The work deals with the preparation of amorphous chalcogenides by three various methods and with study of properties of prepared samples. The used methods were thermal evaporation, pulsed laser deposition and flash thermal evaporation. The use of thermal evaporation is possible for good films preparation of number materials that evaporate without composition change. Pulsed laser deposition is a suitable method for preparation of multicomponent chalcogenides thin films assuming a suitable deposition conditions and geometrical arrangement of instrument. It has been demonstrated that the flash thermal evaporation method is suitable for preparation of multicomponent amorphous chalcogenides thin films as well. However, the temperature of substrates must be controlled.	tenké vrstvy; chalkogenidy; evaporace; PLD
eng	Comparisons of various deposition techniques for preparation of thin films	The work deals with the preparation of amorphous chalcogenides by three various methods and with study of properties of prepared samples. The used methods were thermal evaporation, pulsed laser deposition and flash thermal evaporation. The use of thermal evaporation is possible for good films preparation of number materials that evaporate without composition change. Pulsed laser deposition is a suitable method for preparation of multicomponent chalcogenides thin films assuming a suitable deposition conditions and geometrical arrangement of instrument. It has been demonstrated that the flash thermal evaporation method is suitable for preparation of multicomponent amorphous chalcogenides thin films as well. However, the temperature of substrates must be controlled.	thin films; chalcogenides; thermal evaporation; flash evaporation; PLD