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Crystallization behavior of RF magnetron sputtered Ge2Sb2.3Te4Se thin films

Authors: Gutwirth Jan | Přikryl Jan | Bezdička Petr | Střižík Lukáš | Vlček Milan | Wágner Tomáš | Frumar Miloslav

Year: 2012

Type of publication: ostatní do riv

Page from-to: nestránkováno

Titles:

Language	Name	Abstract	Keywords
cze	Crystallization behavior of RF magnetron sputtered Ge2Sb2.3Te4Se thin films	Thin amorphous Ge-Sb-Te-Se films were deposited by RF (f = 13.56 MHz) magnetron sputtering of Ge2Sb2.3Te4Se target in argon plasma. Feasibility of prepared thin films for PC-RAM application was tested via four-point probe measurement of temperature dependence of sheet resistance known as Van der Pauw technique. As-deposited and thermally treated thin films were characterized by the same way. Composition, chemical homogeneity and surface morphology were studied by Energy Dispersive X-Ray analysis coupled with Scanning Electron Microscopy (SEM-EDX) whilst crystallinity was determined by X-Ray diffraction (XRD). Moreover, optical properties of as-deposited thin films were determined due Variable Angle Spectroscopic Ellipsometry (VASE). Influence of deposition conditions or thermal treatment to composition, crystallinity and surface morphology were established. Profile of temperature dependence of sheet resistance and characteristic temperatures (e.g. crystallization temperature) were obtained and discussed.	Krystalizace; chalkogenidy; tenké vrstvy
eng	Crystallization behavior of RF magnetron sputtered Ge2Sb2.3Te4Se thin films	Thin amorphous Ge-Sb-Te-Se films were deposited by RF (f = 13.56 MHz) magnetron sputtering of Ge2Sb2.3Te4Se target in argon plasma. Feasibility of prepared thin films for PC-RAM application was tested via four-point probe measurement of temperature dependence of sheet resistance known as Van der Pauw technique. As-deposited and thermally treated thin films were characterized by the same way. Composition, chemical homogeneity and surface morphology were studied by Energy Dispersive X-Ray analysis coupled with Scanning Electron Microscopy (SEM-EDX) whilst crystallinity was determined by X-Ray diffraction (XRD). Moreover, optical properties of as-deposited thin films were determined due Variable Angle Spectroscopic Ellipsometry (VASE). Influence of deposition conditions or thermal treatment to composition, crystallinity and surface morphology were established. Profile of temperature dependence of sheet resistance and characteristic temperatures (e.g. crystallization temperature) were obtained and discussed.	chalcogenides; thin films; magnetron sputtering; crystallization