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Publication detail

Hot embossing of chalcogenide glass by soft lithography

Authors: Fudouzi Hiroshi | Sawada T. | Orava Jiří | Greer A.L. | Kohoutek Tomáš

Year: 2012

Type of publication: ostatní do riv

Page from-to: nestránkováno

Titles:

Language	Name	Abstract	Keywords
cze	Hot embossing of chalcogenide glass by soft lithography	We prepared arrays of micrometer-sized features such as lines and lenses onto centimeter-square surface areas of chalcogenide As-S and As-Se bulk glasses by using nanoimprint lithography employing a soft PDMS stamp. A polymer stamp was obtained as a replica from lithographically patterned silicon master and then used for low load imprinting of glass surfaces heated near their softening points. We confirmed that patterning of high refractive index chalcogenide glasses gives a great promise in a facile fabrication of effective diffracting and focusing micro-optical elements and nanostructured surfaces such as anti-reflection surfaces, 2D-photonic crystals and for surface enhanced effects such as luminescence or chemical sensing in the near future.	chalkogenidová skla; nanostruktura; litografie
eng	Hot embossing of chalcogenide glass by soft lithography	We prepared arrays of micrometer-sized features such as lines and lenses onto centimeter-square surface areas of chalcogenide As-S and As-Se bulk glasses by using nanoimprint lithography employing a soft PDMS stamp. A polymer stamp was obtained as a replica from lithographically patterned silicon master and then used for low load imprinting of glass surfaces heated near their softening points. We confirmed that patterning of high refractive index chalcogenide glasses gives a great promise in a facile fabrication of effective diffracting and focusing micro-optical elements and nanostructured surfaces such as anti-reflection surfaces, 2D-photonic crystals and for surface enhanced effects such as luminescence or chemical sensing in the near future.	chalcogenide glass; nanoimprint litography; nanostructure;