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Spectroscopic Ellipsometry Study of Boron Doped Nanocrystalline Diamond Films Deposited by MW-PECVD

Authors: Mistrík Jan | Janíček Petr | Taylor A. | Fendrych F. | Hubík P. | Vacík J. | Vlčková Z. | Nesládek M.

Year: 2013

Type of publication: ostatní - přednáška nebo poster

Page from-to: nestránkováno

Titles:

Language	Name	Abstract	Keywords
eng	Spectroscopic Ellipsometry Study of Boron Doped Nanocrystalline Diamond Films Deposited by MW-PECVD	Various carbon-related nanostructures are now studied due to their promising properties and broad range of applications. CVD grown nanocrystalline diamond (NCD) films belong to this family of materials and have been already used for example as MEMS, biological platforms, orthopaedic and vascular implants coatings, and electrodes. Doping of NCD films with Boron leads to p-type conductance and enables utilization of diamond?s unique semiconductor properties such as wide bandgap, high breakdown voltage and high electron and hole mobilities. Our work presents potentiality of MIR-VIS-UV spectro-scopic ellipsometry as a characterization tool applied for B-NCD films. Addressed are parameters as (1) hole concentration and their mobilities (2) plasmons (3) phonon & defect related transitions (4) film thickness, surface roughness and (5) diamond quality. Results of complementary techniques are included and compared with ellipsometry data.	Spectroscopic Ellipsometry; Boron Doped; MW-PECVD