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Mid-Infrared Ellipsometry Study of B-NCD Films Deposited by MW-PECVD

Authors: Janíček Petr | Mistrík Jan | Taylor A. | Fendrych F. | Hubík P. | Vacík J. | Vlčková Z. | Nesládek M.

Year: 2013

Type of publication: ostatní - přednáška nebo poster

Page from-to: nestránkováno

Titles:

Language	Name	Abstract	Keywords
eng	Mid-Infrared Ellipsometry Study of B-NCD Films Deposited by MW-PECVD	We report on the MID-Infrared spectro-ellipsometry characterization of B-NCD films grown on fused quartz substrates as well as on Si wafers using microwave plasma enhanced linear CVD apparatus with H2/CH4/CO2 and H2/CH4 gas mixture and trimethylboron as a dopant. Electrical transport properties as hole concentration (approx. 10^21 cm-3) and hole mobility (approx. 1 cm2V-1s-1) were obtained from Drude term dominating optical properties in Mid-IR. Other phenomena as possible plasmon resonances and defect related electron transitions in nanocrystallined diamond will be also discussed.	Mid-Infrared; Spectroscopic Ellipsometry; B-NCD Films; MW-PECVD