Publication detail

Fabrication of surface relief optical elements in ternary chalcogenide thin films by direct laser writing

Authors: Voynarovych Ivan | Schroeter Siegmund | Poehlmann Ruediger | Vlček Miroslav

Year: 2015

Type of publication: článek ve sborníku

Name of source: PHOTOPTICS 2015, Proceedings of the 3rd International Conference on Photonics, Optics and Laser Technology, Volume 2

Publisher name: SciTePress - Science and Technology Publications

Place: Porto

Page from-to: 134-139

Titles:

Language	Name	Abstract	Keywords
cze	Tvorba povrchově reliefních prvků v ternárních chalkogenidových tenkých vrstvách metodou přímého zápisu laserem	Metodou přímého zápisu vysoce intenzivním cw laserem byly vytvořeny povrchově reliefní optické prvky v ternárních vrstvách systémů As-S-Se a Ge-As-S. Byl studován vliv podmínek zápisu struktur na jejich topologii a mechanismus tvorby. Byly měřeny a diskutovány spektrální závislosti difrakční účinnosti	přímý laserový zápis;chalkogenidová skla;3D struktury
eng	Fabrication of surface relief optical elements in ternary chalcogenide thin films by direct laser writing	Direct laser writing with a continuous-wave high intensity and over-band gap laser is applied to realize surface relief optical elements in ternary As-S-Se and Ge-As-S thin chalcogenide films. The topology of created structures in dependence on the experimental conditions is investigated. Analyses indicate that the formation mechanisms of the surface patterns are thermally induced processes generated by the local heating and involve thermoplastic deformation, mass flow induced by the surface tension gradient and evaporation. Diffractive gratings with a period of 2.56 m, depths of up to 100 nm, and different periodic surface structures were patterned at the surface of 1 m thick films. The spectral dependencies of diffraction efficiency were measured and discussed.	direct laser writing;chalcogenide glasses;3D structures

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