Login for students

Login for employees

Publication detail

Experimental design approach for deposition optimization of RF sputtered chalcogenide thin films devoted to environmental optical bio-chemical sensors
Authors: Nazabal Virginie | Baudet Emeline | Sergent M. | Němec Petr | Rinnert E. | Michel K. | Bureau B.
Year: 2015
Type of publication: ostatní - přednáška nebo poster
Page from-to: nestránkováno
Titles:
Language Name Abstract Keywords
eng Experimental design approach for deposition optimization of RF sputtered chalcogenide thin films devoted to environmental optical bio-chemical sensors Experimental design approach was studied and used for the deposition optimization of RF sputtered chalcogenide thin films which were devoted to environmental optical bio-chemical sensors. experimental design; amorphous chalcogenides; thin films; sputtering

Departments

Other Parts

Map

en.mapy.cz

Services

Popular Links

© 2023 University of Pardubice, Studentská 95, 532 10 Pardubice 2
Phone: +420 466 036 111, 466 036 112, 466 036 113
Webmaster, RSS
Data box ID: f5vj9hu
Accessibility Statement
CC BY-NC-ND 4.0Creative CommonsAttributionNonCommercialNoDerivatives