Publication detail

Antireflection In2O3 coatings of self-organized TiO2 nanotube layers prepared by atomic layer deposition

Authors: Macák Jan | Přikryl Jan | Sopha Hanna Ingrid | Střižík Lukáš

Year: 2015

Type of publication: článek v odborném periodiku

Name of source: Physica Status Solidi-Rapid Research Letters

Publisher name: Wiley-VCH

Place: Weinheim

Page from-to: 516-520

Titles:

Language	Name	Abstract	Keywords
cze	Antireflection In2O3 coatings of self-organized TiO2 nanotube layers prepared by atomic layer deposition	We report on the uniform anti-reflection coating of TiO2 nanotube layers with a secondary material - indium trioxide (In2O3) - by atomic layer deposition (ALD). We provide for the first time the detailed evidence of the ALD deposited coating inside nanotubes for three different tube layers with aspect ratio up to approximate to 80, which is so far the highest aspect ratio reported for ALD-processed self-organized anodic TiO2 nanotubes. We show that uniform In2O3 coating of the nanotubes strongly influences the overall reflectance of the layers due to intrinsic properties of In2O3
eng	Antireflection In2O3 coatings of self-organized TiO2 nanotube layers prepared by atomic layer deposition	We report on the uniform anti-reflection coating of TiO2 nanotube layers with a secondary material - indium trioxide (In2O3) - by atomic layer deposition (ALD). We provide for the first time the detailed evidence of the ALD deposited coating inside nanotubes for three different tube layers with aspect ratio up to approximate to 80, which is so far the highest aspect ratio reported for ALD-processed self-organized anodic TiO2 nanotubes. We show that uniform In2O3 coating of the nanotubes strongly influences the overall reflectance of the layers due to intrinsic properties of In2O3.	TiO2 nanotubes;In2O3;antireflection coating;atomic laser deposition;light absorption

Search