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Spectroscopic ellipsometry characterization of spin-coated Ge25S75 chalcogenide thin films

Authors: Janíček Petr | Šlang Stanislav | Pálka Karel | Vlček Miroslav

Year: 2016

Type of publication: ostatní - přednáška nebo poster

Page from-to: nestránkováno

Titles:

Language	Name	Abstract	Keywords
eng	Spectroscopic ellipsometry characterization of spin-coated Ge25S75 chalcogenide thin films	Chalcogenide glasses are semiconductor optical materials with promising potential especially in infrared optics. Great effort has been invested into research of non-toxic chalcogenide glasses which could be mass produced by coating or printing techniques. Major disadvantage of these solution based deposition methods is the content of residual solvent molecules remaining in the thin film’s structure, which can be significantly decreased by proper post-deposition annealing. Our contribution is based on extension of our previous structural and optical study of spin-coated Ge25S75 chalcogenide thin films. We present potentialities of spectroscopic ellipsometry as a tool for characterizing of optical properties (refractive index and extinction coefficient) and morphological properties (e.g. thickness and surface roughness) of spin-coated Ge25S75 chalcogenide thin films annealed at different temperatures. The study is focused on consideration of different sample models in evaluation of spectroscopic ellipsometry data of studied layers. Infrared ellipsometry will be presented as a tool capable to evaluate content of residual solvent molecules remaining in the thin film’s structure. Anomalous optical behavior of layer annealed at higher temperature (>210°C) will be presented and discussed.	spectroscopic ellipsometry; optical properties; chalcogenide glass; thin films; spin-coating