Publication detail

Optical investigations of the quality and optical processes of photonic and plasmonic nanostructures

Year: 2016

Type of publication: ostatní - přednáška nebo poster

Page from-to: nestránkováno

Titles:

Language	Name	Abstract	Keywords
eng	Optical investigations of the quality and optical processes of photonic and plasmonic nanostructures	Optical scatterometry based on spectroscopic ellipsometry and other measurement techniques together with optical simualtions are used to analyze the quality of various nanostructure patterns and to study the optical behavior of selected photonic and plasmonic devices.

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