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Rigorous Coupled Wave Analysis of Near-field Optical Problems
Authors: Antoš Roman | Veis Martin | Pálka Karel | Mistrík Jan | Janíček Petr | Vlček Miroslav | Ishibashi T.
Year: 2016
Type of publication: ostatní - přednáška nebo poster
Page from-to: nestránkováno
Titles:
Language Name Abstract Keywords
eng Rigorous Coupled Wave Analysis of Near-field Optical Problems Theoretical and practical applications Rigorous Coupled Wave Analysis of Near-field optical problems (diffraction gratings measured by ellipsometry and scatterometry measurements)

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