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Selenide sputtered films development for MIR environmental sensor
Authors: Baudet Emeline | Gutierrez-Arroyo A. | Němec Petr | Bodiou L. | Lemaitre J. | De Sagazan O. | Lhermitte H. | Rinnert E. | Michel K. | Bureau B. | Charrier J. | Nazabal Virginie
Year: 2016
Type of publication: článek v odborném periodiku
Name of source: Optical Materials Express
Publisher name: Optical Society of America
Place: Washington, DC
Page from-to: 2616-2627
Titles:
Language Name Abstract Keywords
cze Vývoj naprašovaných selenidových vrstev pro environmentální senzor ve střední infračervené oblasti spektra Byl navržen a připraven mikrosenzor pro detekci evanescentních vln ve střední infračervené oblasti spektra založený na selenidových sklech. Tenké vrstvy Ge-Sb-Se byly úspěšně deponovány radiofrekvenčním magnetronovým naprašováním. Za účelem studia indexu lomu v blízké a střední infračervené oblasti spektra, drsnosti povrchu a smáčivosti byly vrstvy charakterizovány spektroskopickou elipsometrií, mikroskopií atomárních sil a měřením kontaktního úhlu. Selenidové naprašované vrstvy byly mikrovzorovány reaktivním iontovým leptáním s indukčně vázaným plazmatem. optické vlnovody; tenké vrstvy; chakogenidová skla; senzor
eng Selenide sputtered films development for MIR environmental sensor A micro-sensor based on selenide glasses for evanescent wave detection in mid-infrared spectral range was designed and fabricated. Ge-Sb-Se thin films were successfully deposited by radio-frequency magnetron sputtering. In order to characterize them spectroscopic ellipsometry, atomic force microscopy and contact angle measurements were employed to study near and middle infrared refractive index, surface roughness and the wettability, respectively. Selenide sputtered films were micro-patterned by means of reactive ion etching with inductively coupled plasma process enabling single-mode propagation at a wavelength of 7.7 mu m for a waveguide width between 8 and 12 mu m. Finally, optical waveguide surface was functionalized by deposition of a hydrophobic polymer, which will permit detection of organic molecules in water. Thus, the optical transducer is a ridge waveguide composed by cladding and guiding Ge-Sb-Se sputtered layers exhibiting a tailored refractive index contrast and a polymer layer onto its surface ready for environmental detections in middle infrared optical waveguides; thin films; chalcogenide glasses; sensor

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