University of PardubiceFaculty of Chemical Technology

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Micro and nanostructuring of chalcogenide glasses

Authors: Vlček Miroslav | Pálka Karel | Šlang Stanislav | Loghina Liudmila | Kadeřávková Anastasia

Year: 2019

Type of publication: ostatní - přednáška nebo poster

Page from-to: nestránkováno

Titles:

Language	Name	Abstract	Keywords
eng	Micro and nanostructuring of chalcogenide glasses	Chalcogenide glasses, non-oxide glasses based on one or more chalcogen element (S, Se, Te), usually alloyed with more electropositive network-forming elements such as As, Ge or others posses many unique properties which make them extraordinary materials for photonics as well as applications in other fields. The presence of chalcogens and other heavy elements in the ChG structure results in broad transparency in the infrared (IR) spectral region (sulfur based glasses are transparent usually up to wavelengths 10-12 μm, selenides up to 14-16 μm and tellurides even up to 20 μm]), significant increase in refractive index (with usual values 2.0 – 3.2) in comparison with oxide glasses [1 - 2]. Chalcogenide glasses also possess much lower structural rigidity which often results in their disposition to structural changes being exposed to appropriate irradiation such as (over)band-gap light, electron beam, etc or by annealing resulting in changes of physical and chemical properties of these materials. Low rigidity also allows their direct 3 D structuring by focused laser beam exposure or by hot embossing. In presented work we summarize our results with regard to micro- and nano- structuring of thin chalcogenide glasses thin layers fabricated by vacuum thermal evaporation techniques and by solution based deposition technique (spin coating). Thin layers structuring was realized using either exposure with photon and/or electron beam with subsequent selective etching or by direct patterning them with focused laser beam as well as by hot embossing. Examples of high optical quality diffractive optical elements fabricated in studied As and Ge based chalcogenide glasses thin layers are given and their diffractive properties are demonstrated.