Publication detail

Deposition of MoSe2 flakes using cyclic selenides

Year: 2021

Type of publication: článek v odborném periodiku

Name of source: RSC Advances

Publisher name: ROYAL SOC CHEMISTRY

Place: CAMBRIDGE

Page from-to: 22140–22147

Titles:

Language	Name	Abstract	Keywords
cze	Depozice MoSe2 s použitím cyklických selenidů	Pro depozici atomárních vrstev byla navržena a připravena série čtyř-, pěti- a šestičlenných cyklických silylselenidů. Nově vyvinutá metoda syntézy využila přímou a jednoduchou reakci selenu s chlorsilany. Vyvinuté čtyřčlenné cyklické silylselenidy se ukázaly jako vhodné prekurzory pro ALD sloučeniny MoSe2.	depozice atomárních vrstev; selenidy
eng	Deposition of MoSe2 flakes using cyclic selenides	The currently limited portfolio of volatile organoselenium compounds used for atomic layer deposition (ALD) has been extended by designing and preparing a series of four-, five- and six-membered cyclic silylselenides. Their fundamental properties were tailored by alternating the ring size, the number of embedded Se atoms and the used peripheral alkyl chains. In contrast to former preparations based on formation of sodium or lithium selenides, the newly developed synthetic method utilizes a direct and easy reaction of elemental selenium with chlorosilanes. Novel 2,2,4,4-tetraisopropyl-1,3,2,4-diselenadisiletane, which features good trade-off between chemical/thermal stability and reactivity, has been successfully used for gas-to-solid phase reaction with MoCl5 affording MoSe2. A thorough characterization of the as-deposited 2D MoSe2 flakes revealed its out-of-plane orientation and high purity. Hence, the developed four-membered cyclic silylselenide turned out to be well-suited Se-precursor for ALD of MoSe2.	atomic layer deposition; selenide

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