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Ablation of chalcogenide bulk glasses and thin films with a deep ultraviolet nanosecond laser

Authors: Knotek Petr | Smolík Jan | Černošková Eva | Tichý Ladislav | Kutálek Petr

Year: 2021

Type of publication: ostatní - přednáška nebo poster

Page from-to: nestránkováno

Titles:

Language	Name	Abstract	Keywords
eng	Ablation of chalcogenide bulk glasses and thin films with a deep ultraviolet nanosecond laser	Binary (As2S3, As2Se3, GeS2 GeSe2 and GeSe3) and ternary (stoichiometric and nonstoichiometric Ge-Sb-S) bulk glasses and corresponding thin films were prepared and illuminated with deep ultraviolet nanosecond (DUV ns) pulsed laser operating at 213 nm. The illumination of samples led to the reproducible crater's formation. Subsequently, the influence of the pulses number and laser fluence on their creation was studied. The ablation rate and laser-induced ablation threshold (LIAT) were determined based on these experiments. The LIAT and ablation rate were compared with the chemical composition of stoichiometric, non-stoichiometric and phase separated glasses and thin films. As an application possibility, the formation of the diffraction gratings by laser direct writing is presented and their functionality is demonstrated.	glasses; thin films; photo-induced effects; lasers; atomic force microscopy