Publication detail
On the ultimate resolution of As2S3-based inorganic resists
Authors:
Nesterov S., I | Boyko M. E | Krbal Miloš | Kolobov A., V
Year: 2021
Type of publication: článek v odborném periodiku
Name of source: Journal of Non-Crystalline Solids
Publisher name: Elsevier Science BV
Place: Amsterdam
Page from-to: 120816
