Publication detail
On the ultimate resolution of As2S3-based inorganic resists
Authors:
Nesterov S., I | Boyko M. E | Krbal Miloš | Kolobov A., V
Year:
2021
Type of publication:
článek v odborném periodiku
Name of source:
Journal of Non-Crystalline Solids
Publisher name:
Elsevier Science BV
Place:
Amsterdam
Page from-to:
120816
