Publication detail

Amorphous chalcogenide thin films: tailoring of multisource sputtering conditions towards required chemical composition

Authors: Gutwirth Jan | Kotrla Magdaléna | Halenkovič Tomáš | Nazabal Virginie | Němec Petr

Year: 2022

Type of publication: ostatní - přednáška nebo poster

Page from-to: nestránkováno

Titles:

Language	Name	Abstract	Keywords
eng	Amorphous chalcogenide thin films: tailoring of multisource sputtering conditions towards required chemical composition	The model to tailor the required chemical composition of thin films fabricated via multisource deposition, exploiting basic physicochemical constants of source materials, is developed.

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