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Mechanism of Photodoping of Silver in Amorphous Chalcogenide Film for Gray Scale Lithography

Autoři: Kovalskiy Andriy | Jain Himanshu | Vlček Miroslav | Waits Chris | Dubey Madan

Rok: 2006

Druh publikace: ostatní - přednáška nebo poster

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Jazyk	Název	Abstrakt	Klíčová slova
cze	Mechanismus fotoindukované difuze stříbra do chalkogenidových vrstev využitelné pro 3D litografii	Mechanism of the early stages of silver photo-diffusion into As2S3 thin film is investigated using XPS on the samples prepared within the Scienta ESCA-300 spectrometer. The new insight of silver doping of chalcogenide glasses was applied to improve the selectivity of dry etching procedure for gray scale lithography.
eng	Mechanism of Photodoping of Silver in Amorphous Chalcogenide Film for Gray Scale Lithography	Mechanism of the early stages of silver photo-diffusion into As2S3 thin film is investigated using XPS on the samples prepared within the Scienta ESCA-300 spectrometer. The new insight of silver doping of chalcogenide glasses was applied to improve the selectivity of dry etching procedure for gray scale lithography.	chalcogenide glass, photodoping, gray scale lithography

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