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Publikace detail

Comparisons of various deposition techniques for preparation of thin films
Rok: 2012
Druh publikace: ostatní do riv
Strana od-do: nestránkováno
Tituly:
Jazyk Název Abstrakt Klíčová slova
cze Comparisons of various deposition techniques for preparation of thin films The work deals with the preparation of amorphous chalcogenides by three various methods and with study of properties of prepared samples. The used methods were thermal evaporation, pulsed laser deposition and flash thermal evaporation. The use of thermal evaporation is possible for good films preparation of number materials that evaporate without composition change. Pulsed laser deposition is a suitable method for preparation of multicomponent chalcogenides thin films assuming a suitable deposition conditions and geometrical arrangement of instrument. It has been demonstrated that the flash thermal evaporation method is suitable for preparation of multicomponent amorphous chalcogenides thin films as well. However, the temperature of substrates must be controlled. tenké vrstvy; chalkogenidy; evaporace; PLD
eng Comparisons of various deposition techniques for preparation of thin films The work deals with the preparation of amorphous chalcogenides by three various methods and with study of properties of prepared samples. The used methods were thermal evaporation, pulsed laser deposition and flash thermal evaporation. The use of thermal evaporation is possible for good films preparation of number materials that evaporate without composition change. Pulsed laser deposition is a suitable method for preparation of multicomponent chalcogenides thin films assuming a suitable deposition conditions and geometrical arrangement of instrument. It has been demonstrated that the flash thermal evaporation method is suitable for preparation of multicomponent amorphous chalcogenides thin films as well. However, the temperature of substrates must be controlled. thin films; chalcogenides; thermal evaporation; flash evaporation; PLD