Univerzita PardubiceFakulta chemicko- technologická

Univerzita Pardubice

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English

Publikace detail

Nanoimprint lithography of chalcogenide glasses with PDMS stamps

Autoři: Kohoutek Tomáš | Fudouzi Hiroshi | Orava Jiří | Greer A.L.

Rok: 2012

Druh publikace: ostatní do riv

Strana od-do: nestránkováno

Tituly:

Jazyk	Název	Abstrakt	Klíčová slova
cze	Nanoimprint lithography of chalcogenide glasses with PDMS stamps	We prepared arrays of micrometer-sized features such as lines and lenses onto centimeter-square surface areas of chalcogenide As-S and As-Se bulk glasses by using nanoimprint lithography employing a soft PDMS stamp. A polymer stamp was obtained as a replica from lithographically patterned silicon master and then used for low load imprinting of glass surfaces heated near their softening points. We confirmed that patterning of high refractive index chalcogenide glasses gives a great promise in a facile fabrication of effective diffracting and focusing micro-optical elements and nanostructured surfaces such as anti-reflection surfaces, 2D-photonic crystals and for surface enhanced effects such as luminescence or chemical sensing in the near future.	chalkogenidové sklo; litografie; PDMS známky
eng	Nanoimprint lithography of chalcogenide glasses with PDMS stamps	We prepared arrays of micrometer-sized features such as lines and lenses onto centimeter-square surface areas of chalcogenide As-S and As-Se bulk glasses by using nanoimprint lithography employing a soft PDMS stamp. A polymer stamp was obtained as a replica from lithographically patterned silicon master and then used for low load imprinting of glass surfaces heated near their softening points. We confirmed that patterning of high refractive index chalcogenide glasses gives a great promise in a facile fabrication of effective diffracting and focusing micro-optical elements and nanostructured surfaces such as anti-reflection surfaces, 2D-photonic crystals and for surface enhanced effects such as luminescence or chemical sensing in the near future.	chalcogenide glass; nanoimprint litography; PDMS stamps