Univerzita Pardubice Fakulta chemicko- technologická

Univerzita Pardubice

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Publikace detail

Pulsed laser deposited alumina thin films

Autoři: Boidin Rémi | Halenkovič Tomáš | Nazabal Virginie | Beneš Ludvík | Němec Petr

Rok: 2015

Druh publikace: ostatní - přednáška nebo poster

Strana od-do: nestránkováno

Tituly:

Jazyk	Název	Abstrakt	Klíčová slova
eng	Pulsed laser deposited alumina thin films	Thin alumina films with thickness from a few nanometers up to 100-200 nm were fabricated via UV PLD exploiting KrF excimer laser operating at 248 nm (300 mJ, 30 ns) under vacuum or under different pressure in Ar atmosphere. Prepared layers were characterized in terms of their morphology and topography (using SEM/AFM), structure (XRD) and optical properties (variable angle spectroscopic ellipsometry).	alumina; pulsed laser deposition; thin films