Publikace detail

Optical investigations of the quality and optical processes of photonic and plasmonic nanostructures

Rok: 2016

Druh publikace: ostatní - přednáška nebo poster

Strana od-do: nestránkováno

Tituly:

Jazyk	Název	Abstrakt	Klíčová slova
eng	Optical investigations of the quality and optical processes of photonic and plasmonic nanostructures	Optical scatterometry based on spectroscopic ellipsometry and other measurement techniques together with optical simualtions are used to analyze the quality of various nanostructure patterns and to study the optical behavior of selected photonic and plasmonic devices.

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