Publikace detail

Optical characteristics of pulsed laser deposited Ge-Sb-Te thin films studied by spectroscopic ellipsometry.

Autoři: Němec Petr | Přikryl Jan | Nazabal Virginie | Frumar Miloslav

Rok: 2011

Druh publikace: článek v odborném periodiku

Název zdroje: Journal of Applied Physics

Název nakladatele: American Institute of Physics

Místo vydání: Melville

Strana od-do: "073520-1"-"073520-7"

Tituly:

Jazyk	Název	Abstrakt	Klíčová slova
cze	Optické vlastnosti tenkých vrstev Ge-Sb-Te deponovaných pulzním laserem studované spektrální elipsometrií.	Spektrální elipsometrií byly studovány optické vlastnosti tenkých vrstev Ge-Sb-Te deponovaných pulzním laserem.	tenká vrstva;deponovaný pulzní laser;Ge-Sb-Te;spektrální elipsometrie
eng	Optical characteristics of pulsed laser deposited Ge-Sb-Te thin films studied by spectroscopic ellipsometry.	Pulsed laser deposition technique was used for the fabrication of (GeTe)(1-x)(Sb(2)Te(3))(x) (x = 0, 0.33, 0.50, 0.66, and 1) amorphous thin films. Scanning electron microscopy with energy-dispersive x-ray analysis, x-ray diffraction, optical reflectivity, and sheet resistance temperature dependences as well as variable angle spectroscopic ellipsometry measurements were used to characterize as-deposited (amorphous) and annealed (rocksaltlike) layers. In order to extract optical functions of the films, the Cody-Lorentz model was applied for the analysis of ellipsometric data. Fitted sets of Cody-Lorentz model parameters are discussed in relation with chemical composition and the structure of the layers. The GeTe component content was found to be responsible for the huge optical functions and thickness changes upon amorphous-to-fcc phase transition	spectroscopic ellipsometry;thin films;pulsed laser deposition;Ge-Sb-Te

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