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Optical properties and surface structuring of Ge20Sb5S75 amorphous chalcogenide thin films deposited by spin-coating and vacuum thermal evaporation

Autoři: Šlang Stanislav | Janíček Petr | Pálka Karel | Vlček Miroslav

Rok: 2016

Druh publikace: ostatní - přednáška nebo poster

Strana od-do: nestránkováno

Tituly:

Jazyk	Název	Abstrakt	Klíčová slova
eng	Optical properties and surface structuring of Ge20Sb5S75 amorphous chalcogenide thin films deposited by spin-coating and vacuum thermal evaporation	Chalcogenide glasses (ChGs) are semiconducting optical materials with high refractive index and wide IR transmission window. Deposited thin films are also known for their frequent photo-sensitivity. ChGs have found variety of application as material suitable for fabrication of optical elements in IR optics (fibers, planar waveguides), optical recording discs or as high resolution photoresists. ChG thin films are usually deposited by vacuum based deposition techniques, but solution based deposition techniques (such as spin-coating) are also gaining attention. The widespread application of previously studied solution deposited thin films is limited due to the content of toxic arsenic. Thus the further study of different non-toxic ChG systems is needed. In our work we present the comparison of thermally evaporated and spin-coated thin films of non-toxic Ge20Sb5S75 glass composition. The optical parameters (refractive index and optical bandgap) and morphological properties (thickness and roughness) of thin films were studied after different thermal and exposure treatments by spectroscopic ellipsometry. Subsequently the structure and composition of previously prepared and treated thin films were studied by Raman spectroscopy and Energy-dispersive X-ray spectroscopy, respectively. The thin films prepared by both deposition techniques were altered using UV and electron beam lithography.	chlacogenide glass; optical properties; spin-coating; thermal evaporation; surface structuring

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