Univerzita Pardubice Fakulta chemicko- technologická

Univerzita Pardubice

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Publikace detail

THERMO-INDUCED CHANGES IN As30S70-xSex SPIN-COATED THIN FILMS

Autoři: Pálka Karel | Pražáková Lucie | Šlang Stanislav | Vlček Miroslav

Rok: 2016

Druh publikace: ostatní - přednáška nebo poster

Strana od-do: nestránkováno

Tituly:

Jazyk	Název	Abstrakt	Klíčová slova
eng	THERMO-INDUCED CHANGES IN As30S70-xSex SPIN-COATED THIN FILMS	Chalcogenide glasses (ChGs) are intensively studied materials due to their interesting physical and chemical properties such as high values of refractive index, wide transmission window in IR, solubility in alkaline solutions, etc. Because of the metastability of amorphous phase the ChGs are often sensitive to various kinds of radiation changing the structure and therefore the properties upon the exposure. The sensitivity of the ChG depends significantly on the history of the sample. Sensitivity to radiation together with good solubility in alkaline solutions often results in selective etching of ChGs. Many practical applications require ChGs in a thin film form. Chosen method of the thin film deposition significantly influences the properties of the final thin film. Traditionally gaseous phase deposition techniques such as vacuum thermal evaporation or laser ablation are used. Recently simpler and cheaper solution based deposition techniques such as spin-coating are gaining attention. We report on the study of optical and chemical properties of As30S70-xSex spin-coated thin films and their thermo-induced changes. Structure of the as-prepared and annealed thin films as well as the structure of source bulk material was investigated using Raman spectroscopy. Possibility of thin film micro/nanopatterning using electron beam lithography was investigated.	chalcogenide glass; thin films;optical properties; spin-coating; electron beam lithography