Univerzita Pardubice Fakulta chemicko- technologická

Univerzita Pardubice

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English

Publikace detail

Electron beam induced changes in optical properties of glassy As35S65 chalcogenide thin films studied by imaging ellipsometry

Autoři: Janíček Petr | Funke Sebastian | Thiesen P.H. | Šlang Stanislav | Pálka Karel | Mistrík Jan | Grinco Marina | Vlček Miroslav

Rok: 2017

Druh publikace: ostatní - přednáška nebo poster

Strana od-do: nestránkováno

Tituly:

Jazyk	Název	Abstrakt	Klíčová slova
eng	Electron beam induced changes in optical properties of glassy As35S65 chalcogenide thin films studied by imaging ellipsometry	Based on and extended of previous results we present detailed study of the change of the optical properties (refractive index and extinction coefficient) and morphological properties (e.g. thickness and surface roughness) of thin film of As35S65 chalcogenide glass for different doses of electron beam exposure. By electron beam exposure at different doses local changes of optical properties on micro- and also nano-scale were induced. This study is focused on usage of spectroscopic imaging ellipsometry as a tool for determination of optical and morphological properties of micro-structured thin film of As35S65 chalcogenide glass. Knowledge of the optical properties change dependence on different electron beam dose can help for fabricating of optical elements by high resolution electron beam lithography.