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Radiation induced 3D structuring of chalcogenide glass thin films

Autoři: Vlček Miroslav | Pálka Karel | Šlang Stanislav | Loghina Liudmila | Kadeřávková Anastasia

Rok: 2019

Druh publikace: ostatní - přednáška nebo poster

Strana od-do: nestránkováno

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Jazyk	Název	Abstrakt	Klíčová slova
eng	Radiation induced 3D structuring of chalcogenide glass thin films	Chalcogenide glasses (CHGs) are extraordinary materials for photonics as they possess wide optical transparency window from VIS to far IR spectral region, high refractive index (2,0 – 3,2) and high optical nonlinearity. The weaker covalent bonds in CHGs cause significantly lower rigidity and lower softening temperatures relative to oxide glasses. It results in their sensitivity to various radiation, which can result either in changes of their optical properties and chemical resistance or to direct surface corrugation. All these phenomena can be exploited for fabrication of diffractive optical elements (DOE) in these materials. In this contribution, we present our results of 3D micro- and nano-structuring of CHGs thin films as a result of radiation induced structural changes/mass transport. We demonstrate that the nature of the radiation induced phenomena is multifactorial. It depends not only on glass composition (in our case binary and ternary systems as As-S, As-Se, As-S-Se, Ge-S, Ge-S-Se, Ge-Sb-S), method of thin layers preparation (we applied classical vacuum evaporation method and spin coating) and their prehistory (e.g. thermal prehistory), but also on the type and intensity of interacting radiation (band gap or super-band gap radiation, electron beam) and conditions of the experiment (temperature, air/inert atmosphere etc.). We give evidence that exposure with suitable radiation significantly influences selectivity of consequent wet etching of CHG thin layers in various alkaline solutions and that in case of focused high energy laser beam exposure direct patterning of thin films is possible. Various methods such as UV-VIS, Raman, IR, XPS, SEM, AFM were exploited for complex studies of radiation induced structure/properties changes and to propose possible mechanisms of different energy photons interaction with thin chalcogenide films. Examples of micro and nano structuring for fabrication of various DOE (gratings, Fresnel lenses, microlens arrays, etc.) in the

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